Surfx Technologies Files Patent Infringement Suit Against ONTOS and SET North America

June 04, 2026
Surfx Technologies has filed a federal lawsuit in New Hampshire accusing ONTOS Equipment Systems and SET North America of infringing four U.S. patents related to its atmospheric argon plasma systems used in semiconductor manufacturing.

Surfx Technologies has filed a federal lawsuit for patent infringement against ONTOS Equipment Systems and its affiliate SET North America, according to a press release. The case was filed in the United States District Court for the District of New Hampshire.

The complaint alleges that ONTOS and SET North America infringed four U.S. patents held by Surfx, covering low temperature atmospheric pressure plasma systems used for surface treatment, cleaning, and metal oxide removal in semiconductor and electronics manufacturing. The patents cited are U.S. Patent Nos. 9,406,485; 10,032,609; 10,800,092; and 11,518,082.

Surfx claims that the ONTOS IS (OEM) and ONTOS CLEAN plasma systems, along with the SETNA FC300 Flip Chip Bonder, infringe all four patents. The company seeks a permanent injunction to prevent future sales and exports of the accused products and is pursuing monetary damages for past infringement.

The case is titled Surfx Technologies, LLC v. ONTOS Equipment Systems, Inc. and SET North America, LLC and is pending before the U.S. District Court for the District of New Hampshire.

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