Siemens Acquires Canopus AI to Strengthen Semiconductor Metrology Capabilities

Feb 5, 2026
Siemens has acquired Canopus AI, a French company specializing in AI-driven metrology solutions, to enhance precision and efficiency in semiconductor manufacturing. The deal expands Siemens’ EDA portfolio with advanced inspection and measurement technologies.

Siemens AG has acquired Canopus AI, a Grenoble-based company known for its AI-driven metrology and inspection software for semiconductor manufacturing, announced in a press release. The acquisition, completed on January 12, 2026, aims to enhance Siemens’ electronic design automation (EDA) portfolio with advanced computational metrology technologies.

Canopus AI’s software uses artificial intelligence to improve wafer and mask inspection accuracy, helping chip manufacturers manage the challenges of smaller geometries and higher production volumes. Siemens said the integration will combine Canopus AI’s metrology tools with its Calibre portfolio to improve wafer pattern fidelity and accelerate yield ramp for advanced semiconductor nodes.

Founded in 2021, Canopus AI has developed a framework called “Metrospection,” which applies AI to bridge conventional metrology and inspection workflows. Siemens stated that the acquisition extends its digital thread for semiconductor design and manufacturing, supporting the creation of high-accuracy digital twins for sub-nanometer process control.

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