Global DUV Lithography Market Projected to Reach $23.69 Billion by 2031

October 20, 2025
The global deep ultraviolet (DUV) lithography systems market is projected to grow from $15.44 billion in 2024 to $23.69 billion by 2031, according to a report by Valuates Reports. Growth is driven by AI, 5G, and semiconductor manufacturing demand.

The global deep ultraviolet (DUV) lithography systems market is expected to expand from USD 15.44 billion in 2024 to USD 23.69 billion by 2031, growing at a compound annual growth rate (CAGR) of 6.4%, according to a report shared by Valuates Reports.

The report attributes the growth to ongoing demand for mature- and mid-node semiconductor production, increased adoption in AI, high-performance computing, and advanced logic applications, as well as the expansion of 5G and IoT technologies. Government investments, advanced packaging, and replacement of installed systems are also contributing factors.

ArF immersion systems are highlighted as key drivers due to their high resolution and precision capabilities, while KrF systems continue to serve mature-node manufacturing needs. The Asia-Pacific region leads the global market, accounting for roughly 65% to 70% of installed DUV systems.

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